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Analytical Services

...for Microelectronics Failures

EDS / EDX / XEDS Analysis

Often times a fail is simply caused by a material found somewhere it shouldn’t be. The next questions that follow are “What is it?” and “How did it get there?”

With the advanced Energy Dispersive X-ray Spectroscopy (EDS) capabilities of Sage Analytical Lab, we’re able to answer at least one of those questions.

With the higher current capabilities of our FE-SEM column, we can obtain accurate spectra of materials to high spatial resolution.

When used in conjunction with the FIB capabilities and multi-axis stage incorporated in the tool, a broad range of analyses can be performed, not just top-down characterization. This tool set ensures quality images and spectra without removing a sample from the chamber